Multifunction Meter for Optical Quantities
with Visual Instrumentation®
* for wavelengths of 310 nm up to greater than 1000 nm with a resolution
of 256 pixel.
* Signal input with fiber optics cable,thus very versatile
* Color measurements with normalized tristimulus values and display
of color spectrum
* Layer thickness measurement for transparent layers in the range from
0.3 æm on to 20 æm
* 3D display of up to 10 spectra in graphic screen and hard copy to
a printer, storage capacity of more than 100 spectra in the instrument.
Optical Measurements made easy
If your task is to make emission, transmission or reflectivity measurements
the SPM 9001 is the ideal instrument.
Some examples for applications are the measurement of the light spectrum
of bulbs or LEDís, absorption measurements of fluids, measurement of optical
filters and much more.
||Spectrum of an energy saving lamp
Taking Data without the Necessity for a PC
The instrument has a very compact size compared to other spectrometers.
This allows the use in many applications.
The light is fed to the instrument via glass fibers. There is a halogen
lamp integrated in the instrument which allows reflection or transmission
measurements without an additional light source.
The SPM 9001 uses a solid diode array module which guarantees an excellent
wavelength stability and a very small temperature drift.
The result of a measurement is plotted directly on the internal LC display.
Two independent cursors make it possible to analyze the data online. The
wavelength as well as the relative intensity are shown on the display.
This way peaks can be attributed fast and easy. The ratio of the intensity
at the cursor positions is also plotted on the screen, even the area under
the curve between the two cursors is shown.
Are you interested in spectra which change in time? Then make use of the
3-D plots (see figure). Up to 10 spectra can be plotted parallel on the
screen. This makes it easy to see immediately, where new peaks in the spectrum
appear and disappear.
||3D-View of 20 spectra
You can use a Time View plot to visualize the change of the intensities
at the two cursor positions. The Time View makes it easy to see changes
The Online Help will give you an immediate Help about the measurement functions
Data Transfer Made Easy
The results of your measurement can be stored on the internal hard drive
of the instrument. They can be transferred to a computer via the RS232
interface for further analyzing.
A Windows software for the data transfer from the SPM 9001 to a PC
is available on request.
The SPM 9001 is equipped with a serial interface for data transfer.
Additionally a complete control via the RS232 interface by an external
computer is possible. This means the instrument can also be used in a system.
glass fibers for different applications
measuring module for transmission measurements
5029/9001 Windows-Software PREMA-Control for data transfer to
additional accessories available on request
Thickness Measurements of a Transparent Layer
The SPM 9001 is a high precision instrument for the determination of layer
Examples for applications are determination of the layer thicknesses
of photo resists on semiconductor wafers and coatings on glass bottles.
Since an optical detection method is used, the measurement is contactless
and will not destroy the film. The light is fed in to the instrument by
a glassfiber, this way it is possible to measure films where they are difficult
Measurements with High Spatial Resolution
The size of the light spot is determined by the optical system which is
used. Usually a y-fiber can be used. In this case the spot size is approximately
1mm. If it is necessary to increase the spatial resolution the glassfiber
can be connected to the photo connector of a light microscope.
No Additional Instrumentation Necessary
The SPM 9001 works as a stand-alone instrument. No additional PC for controlling
is necessary. The instrument is equipped with an internal light source.
There is no need for an additional lamp or power source. They data can
be analyzed directly on the display. Data can be stored in the instrument
or plotted directly to an external printer. The instrument can even be
used for controlling purposes since it has an TTL output. The alarm function
of the instrument allows it to set an alarm if an actual thickness is above
or below a set point.
||The interference spectrum
The thickness is shown on the display of the instrument -
in numbers (left) and graphically (right)
The Principle of the Measurement
White light is reflected at the surface of the film and on the surface
of the layer.
Depending on the wavelength of the light constructive or destructive
interference will occur. The thickness of the film can be calculated from
the interference spectrum with a fourier analysis method if the refracting
index of the film is known.
9024 Y-fiber with FSMA adapter and cylindric head
9025 layer thickness measuring adapter
Do you need an instrument for controlling processes depending on a changing
optical signal? Then the SPM 9001 should be the instrument of your choice.
An important application can be found in the semiconductor industry. The
SPM 9001 is used as controlling unit for endpoint detection. But the field
of application is larger. Everywhere, where you have changing optical signals
(e.g. a change in the emitted, transmitted or reflected light), you can
use this instrument as a control unit.
End Point Detection for Plasma Etching Processes
The SPM 9001 is an ideal instrument for detecting the end point of a plasma
etching process. In this application the fact is used that the light spectrum
of the plasma changes depending of the development of the process. In the
plasma spectrum sharp lines are detected which can be attributed to the
chemical elements involved in the etching process. The intensity of these
lines will change during the etching process. These changes are detcted
by the SPM 9001. If the intensity of a line drops under a certain value
(which is given by the user), or if the ratio between two lines is bigger
or smaller than a given value the process is finished and an output is
Endpoint detection of a Plasma etching process, where
a photoresist is removed from a silicon wafer.
||Figure 1 shows the spectrum of a plasma for the dry etching of a photoresist
during the etching process. The strong emission line at 656 nm belongs
to hydrogen, which is released during the etching process.
||During the etching process a decrease of the hydrogen line and an increase
of a line at 777 nm (which is due to the etching agent oxygen) is observed.
Figure 3 shows the spectrum after the etching process is completed. Here
the oxygen line is dominant.
||The time dependency of the two strongest lines (hydrogen (1) and oxygen
(2)) is shown in figure 3. After the two curves have reached the crossing
point the etching process can be finished (after an additional, process
Process Control possible without additional PC
The SPM 9001 can be used without an additional PC. The measurement can
be triggered via the trigger input on the rear side of the instrument.
There is a TTL output which is also located on the rear side. 4 different
conditions of the instrument are indicated by the TTL output.
|Different event conditions can be selected
|Change between Real Time mode and Time View (the changes of the intensities
at two wavelengths is shown)
|Periodical View (up to 20 spectra are plotted on the display)
|Trigger input and output
|Rear Input Panel Connectors (optional)
|RS232 and Centronics interface
|Number of Pixels
|at wavelength [nm]
|blazed for ca.
|10.24ms bis 2.62s
||10.24ms bis 2.62s
||10.24ms bis 2.62s
||10.24ms bis 2.62s
||10.24ms bis 2.62s
||RS232 for connection to a computer, Centronics for direct printer connection
||via fiber optics cable with SMA connector
|Internal Light Source
||halogen lamp, output via fiber optics cable with SMA connector on the
||stable aluminium case with graphic display (200 x 320 dots)
H x W x D 140mm (3 HU) x 225 mm (½19'') x 275 mm
Weight 8 kg / 18 Ibs
||230 V ± 10 % or 115 V ± 10 % switchable, 50 or 60 Hz
|Options and Accessories
||Immersion probes, cell holder, additional accessories on request
|Warm Up Time
||according EN61010 CE
||EN50081, EN55011, EN50082, CE
||10°C to 45°C in operation, -25°C to 60°C in storage
||< 25°C up to 75 % rel.
> 25°C up to 65 % rel.
© Copyright 1998 Hönow Messtechnik & Computer. Letzte
Revision: 17.03.98. Bearbeiter: OHH
|spectrometer PREMA 9001 optical multifunktion
meter spektrometry, spectroscope color colour spectrum, layer thickness
measurement process control Visual Instrumentation. optics wavelength resolution
inpu, signal light guide cabel norm value spektra, transparent 3D-plot
screen display spektroskopy measuring instrument, emission transmission
reflectivity reflection registrate. lamp bulb LED illumination absorption
chemical liquid filter, energy saving glass fiber integrated halogen source.
diode array module LCD peak analyze relative intensity successive record,
parallel view time serial RS 232 interface. semiconductor industry photo
resist, silicon wafer food film plastic bottle medicine technics engineering,
contactless destroy white substrate surface interference. reflekted ray
Fourier analysis plasma etch endpoint detection, emit transmit, reflect